2007-08 Undergraduate Catalog
Indiana, Pennsylvania 15705
 

Department of Physics

College of Natural Sciences and Mathematics

Credit designation below each title is expressed in (c) class hours per week, (l) lab or (d) discussion section hours per week, and (cr) credits per semester.

NMTT 311 Materials, Safety, and Equipment Overview for Nanofabrication

3c-2l-3cr

Corequisite: NMTT 312

Focuses on cleanroom protocol and provides an overview of the materials, safety, and equipment issues encountered in the practice of “top down” and “bottom up” nanofabrication.

NMTT 312 Basic Nanofabrication Processes

3c-2l-3cr

Corequisite: NMTT 311

A hands-on introduction to the processing sequences involved in “top down,” “bottom up,” and hybrid nanofabrication. Focuses on a step-by-step description of the processes integration needed to fabricate devices and structures.

NMTT 313 Thin Films in Nanofabrication

3c-2l-3cr

Corequisites: NMTT 311 and 312

Provides a detailed understanding of the use and processing of thin film materials in nanofabrication. Emphasizes the understanding and operation of the state-of-the-art deposition and etching processing equipment in the PSU Nanofabrication Facility cleanrooms.

NMTT 314 Lithography and Patterning Techniques

3c-2l-3cr

Corequisite: NMTT 311

Provides knowledge and hands-on treatment to all aspects of advanced lithography and pattern generation processes, covering topics from substrate preparation to exposure using pattern transfer equipment such as stamping and embossing, ion and e-beam, and optical contact and stepper.

NMTT 315 Materials Modifications in Nanofabrication

3c-2l-3cr

Corequisite: NMTT 311

Provides detailed knowledge of the processing steps used in modifying material properties in nanofabrication, including molecular functionalization, cross-linking, metal silicidation, material oxidation, material nitridation, barrier materials, alloying, stress control, annealing, and doping.

NMTT 316 Characterization, Packaging, and Testing of Nanofabrication Structures

3c-2l-3cr

Corequisite: NMTT 311

Addresses the issues and examines a variety of techniques and measurements essential for testing and controlling the final device fabrication, performance, and packaging.

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